Direct micromachining and thin film deposition of polytetrafluoroethylene using synchrotron radiation ablative photodecomposition
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Thin Film Deposition Using Energetic Ions
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ژورنال
عنوان ژورنال: IEEJ Transactions on Electronics, Information and Systems
سال: 1996
ISSN: 0385-4221,1348-8155
DOI: 10.1541/ieejeiss1987.116.12_1341